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Tetramethylammonium hydroxide (TMAH)

Tetramethylammonium hydroxide (TMAH)

CAS Number: 75-59-2

Molecular Formula: C4H13NO

CorrosiveCorrosive
Acute ToxicAcute Toxic
Health HazardHealth Hazard
Environmental HazardEnvironmental Hazard

About Tetramethylammonium hydroxide (TMAH)

Tetramethylammonium hydroxide CAS 75-59-2 serves as a pivotal metal-ion-free basic developer solution in sub-22nm advanced photolithography, semiconductor wafer processing, and the fabrication of microelectromechanical systems (MEMS), where domestic procurement strategies are increasingly prioritizing a certified bulk ...

Synonyms

  • Tetramethylammoniumhydroxid
  • Tetrametanoamonio hydroxido
  • Tetrametiloamonio hydroxido
  • tetramethylazanium hydroxide
  • C4H12N.HO
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Tetramethylammonium hydroxide (TMAH) Specifications

CAS Number
75-59-2
Molecular Formula
C4H13NO
Molecular Weight
91.15 g/mol
IUPAC Name
tetramethylazanium hydroxide
Canonical SMILES
C[N+](C)(C)C.[OH-]
InChI Key
WGTYBPLFGIVFAS-UHFFFAOYSA-M
InChI
InChI=1S/C4H12N.H2O/c1-5(2,3)4;/h1-4H3;1H2/q+1;/p-1
PubChem CID
60966
EINECS Number
200-882-9
MDL Number
MFCD00008280
HSN No
29239000

Tetramethylammonium hydroxide (TMAH) FAQs

Minimum Order Quantity

25 kg (evaluation) · 1 MT (commercial)

Lead Time

3 – 5 weeks estimated

Delivery Terms

FOB*

Packaging

20 L pails, 200 L HDPE drums, 1000 L IBC

US Availability

US Facility Inventory

Documentation

US SDS · COA · TDS · Specification sheet

US Regulatory & Quality Information

TSCA status*

US SDS / HazCom*

GHS classification*

ISO 9001:2015 site*

DOT shipping classification*

FDA status*

EPA status*

California Prop 65*

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Regulatory compliance

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