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Tetrakis(ethylmethylamino)hafnium(IV) (TEMAH)

Tetrakis(ethylmethylamino)hafnium(IV) (TEMAH)

CAS Number: 352535-01-4

Molecular Formula: C12H32HfN4

FlammableFlammable
CorrosiveCorrosive
Acute ToxicAcute Toxic
IrritantIrritant

About the product

Tetrakis(ethylmethylamino)hafnium(IV) (CAS 352535-01-4) has surfaced as a cornerstone organometallic precursor for atomic layer deposition (ALD) and chemical vapor deposition (CVD) mechanisms, specifically engineered for the fabrication of high-k dielectric hafnia thin films within advanced sub-3nm logic and Gate-All-A...

Synonyms

  • TEMAH
  • CTK4H4089
  • ethyl(methyl)azanide,hafnium(4+)
  • Tetrakis(ethylmethylamino) hafnium
  • Tetrakis(methylethylamino) hafnium
View all

Tetrakis(ethylmethylamino)hafnium(IV) (TEMAH) Specifications

CAS Number
352535-01-4
Molecular Formula
C12H32HfN4
Molecular Weight
410.90 g/mol
IUPAC Name
ethyl(methyl)azanide;hafnium(4+)
Canonical SMILES
CC[N-]C.CC[N-]C.CC[N-]C.CC[N-]C.[Hf+4]
InChI Key
NPEOKFBCHNGLJD-UHFFFAOYSA-N
InChI
InChI=1S/4C3H8N.Hf/c4*1-3-4-2;/h4*3H2,1-2H3;/q4*-1;+4
PubChem CID
4103752
EINECS Number
629-684-4
HSN No
29211999 / 28529090

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