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Tetrakis(dimethylamino)hafnium(IV) (TDMAH)

Tetrakis(dimethylamino)hafnium(IV) (TDMAH)

CAS Number: 19782-68-4

Molecular Formula: C8H24HfN4

FlammableFlammable
CorrosiveCorrosive

About Tetrakis(dimethylamino)hafnium(IV) (TDMAH)

Tetrakis(dimethylamido)hafnium(IV) (CAS 19782-68-4) serves as a critical metal-organic precursor specialized in atomic layer deposition (ALD) and chemical vapor deposition (CVD) to engineer ultra-thin high-k dielectric hafnium oxide layers for advanced semiconductor architectures. As the domestic microelectronics secto...

Synonyms

  • Tetrakis(dimethylamino)silane
  • Tetrakis(dimethylamino) hafnium
  • CTK4E2847
  • dimethyl[tris(dimethylamino)hafnio]amine
  • Tetrakis(N,N-dimethylamino) hafnium
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Tetrakis(dimethylamino)hafnium(IV) (TDMAH) Specifications

CAS Number
19782-68-4
Molecular Formula
C8H24HfN4
Molecular Weight
354.79 g/mol
IUPAC Name
tetrakis(dimethylazanide);hafnium(4+)
Canonical SMILES
C[N-]C.C[N-]C.C[N-]C.C[N-]C.[Hf+4]
InChI Key
ZYLGGWPMIDHSEZ-UHFFFAOYSA-N
InChI
InChI=1S/4C2H6N.Hf/c4*1-3-2;/h4*1-2H3;/q4*-1;+4
PubChem CID
140609
EINECS Number
629-069-0
MDL Number
MFCD01862473
HSN No
8112.39.00

Tetrakis(dimethylamino)hafnium(IV) (TDMAH) FAQs

Minimum Order Quantity

25 kg (evaluation) · 1 MT (commercial)

Lead Time

3 – 5 weeks estimated

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FOB*

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20 L pails, 200 L HDPE drums, 1000 L IBC

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