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Tetrakis(dimethylamino)titanium(IV) (TDMAT)

Tetrakis(dimethylamino)titanium(IV) (TDMAT)

CAS Number: 3275-24-9

Molecular Formula: C8H24N4Ti

Purity: --

FlammableFlammable
CorrosiveCorrosive
Acute ToxicAcute Toxic
IrritantIrritant

About the product

Driven by the relentless pursuit of semiconductor miniaturisation, Tetrakis(dimethylamino)titanium(IV) (TDMAT) serves as a critical metal-organic precursor for the atomic layer deposition (ALD) of ultra-thin, highly conformal titanium nitride (TiN) diffusion barriers and titanium dioxide (TiO2) high-k dielectrics in ad...

Synonyms

  • Titanium dimethylamide
  • ACMC-209hva
  • Titanium(IV) dimethylamide
  • dimethylazanide;titanium(4+)
  • Tetrakis(dimethylamido)titanium
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Tetrakis(dimethylamino)titanium(IV) (TDMAT) Specifications

CAS Number
3275-24-9
Molecular Formula
C8H24N4Ti
Molecular Weight
224.17 g/mol
IUPAC Name
tetrakis(dimethylazanide);titanium(4+)
Canonical SMILES
C[N-]C.C[N-]C.C[N-]C.C[N-]C.[Ti+4]
InChI Key
MNWRORMXBIWXCI-UHFFFAOYSA-N
InChI
InChI=1S/4C2H6N.Ti/c4*1-3-2;/h4*1-2H3;/q4*-1;+4
PubChem CID
123185
EINECS Number
221-904-3
MDL Number
MFCD00014861
HSN No
2921 19 90 / 2931 90 90

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