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Hafnium tert-butoxide

Hafnium tert-butoxide

CAS Number: 99409

Molecular Formula: C16H36HfO4

About Hafnium tert-butoxide

Hafnium(IV) tert-butoxide CAS 2172-02-3 is a premier mononuclear precursor increasingly sought after in the semiconductor industry for the atomic layer deposition of high-k dielectric HfO2 thin films, with a required industry-specific purity of 98% for micro and nanoelectronics applications. Tetra-t-butoxyhafnium serve...

Hafnium tert-butoxide Specifications

CAS Number

99409

Molecular Formula

C16H36HfO4

IUPAC Name

hafnium(4+);2-methylpropan-2-olate

Canonical SMILES

CC(C)(C)O[Hf](OC\(C\)\(C\)C)(OC(C)(C)C)OC(C)(C)C

InChI Key

WZVIPWQGBBCHJP-UHFFFAOYSA-N

CAS Number

99409

Molecular Formula

C16H36HfO4

IUPAC Name

hafnium(4+);2-methylpropan-2-olate

Canonical SMILES

CC(C)(C)O[Hf](OC\(C\)\(C\)C)(OC(C)(C)C)OC(C)(C)C

InChI Key

WZVIPWQGBBCHJP-UHFFFAOYSA-N

Physical appearance

Colorless to pale yellow liquid

Thin Film Deposition Precursor

A mononuclear and volatile chemical precursor primarily utilized for the deposition of hafnium dioxide (HfO2) and other hafnium-doped thin films via vapor deposition techniques, such as chemical vapor deposition (CVD) and atomic layer deposition (ALD)

Semiconductor Manufacturing Component

A high-purity source material used to create films with high dielectric constants (high-k), which are essential for the fabrication of advanced semiconductor devices and non-volatile computer memories

Nanomaterial Synthesis Building Block

A starting reagent employed in the production of HfO2 nanoparticles and nanorods through solution-based routes and sol-gel processes

Nuclear Engineering Material

A precursor for hafnium-based materials used as neutron absorbers or getters in nuclear control rods.

Hafnium tert-butoxide FAQs

Minimum Order Quantity

25 kg (pilot) · 1 MT (commercial)

Lead Time

3 – 5 weeks ex-works

Incoterms

FOB · CIF

Packaging

20 L pails, 200 L HDPE drums, 1000 L IBC

Regional Availability

India · EU · Middle East · Southeast Asia

Documentation

SDS · COA · TDS available on request

Compliance & Quality

REACH registered*

GHS/SDS available

ISO 9001:2015 site*

RoHS compliant*

Global sourcing network

Consistent quality & reliability

End-to-end technical support

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