Tantalum ethoxide

CAS Number: 6074-84-6

Molecular Formula: C10H25O5Ta

Purity: 99.98% purity

About Tantalum ethoxide

Tantalum ethoxide (CAS 6074-84-6) serves as a premier metal-organic precursor for the deposition of high-k tantalum oxide thin films, where US semiconductor fabs increasingly demand high purity fine chemicals to achieve the precise dielectric layers required for next-generation DRAM and logic devices. Pentaethoxytantal...

Tantalum ethoxide Specifications

CAS Number

6074-84-6

Molecular Formula

C10H25O5Ta

Molecular Weight

406.25 g/mol

IUPAC Name

Tantalum(V) ethoxide

Canonical SMILES

CCO[Ta](OCC)(OCC)(OCC)OCC

InChI Key

HSXKFDGTKKAEHL-UHFFFAOYSA-N

CAS Number

6074-84-6

Molecular Formula

C10H25O5Ta

Molecular Weight

406.25 g/mol

IUPAC Name

Tantalum(V) ethoxide

Canonical SMILES

CCO[Ta](OCC)(OCC)(OCC)OCC

InChI Key

HSXKFDGTKKAEHL-UHFFFAOYSA-N

Molecular Weight

406.25 g/mol

Purity

99.98% purity

Physical appearance

Colorless to pale yellow liquid or solid

Precursor for Thin Films

A high-purity metalorganic reagent used primarily in chemical vapor deposition (CVD), atomic layer deposition (ALD), and sol-gel processing to fabricate tantalum(V) oxide (Ta2O5) thin films for applications in semiconductors, optics, and electrochromic devices

Dielectric Material Precursor

A critical starting material for the synthesis of ultrathin tantalum oxide layers used as high-k dielectrics in capacitors, dynamic random access memory (DRAM), and field-effect transistors

Nanomaterial Synthesis Reagent

A functional precursor employed in the sol-gel and hydrothermal synthesis of tantalum oxide nanoparticles, nanoshells, and tantalum carbide nanopowders for advanced materials research and hard coatings

Catalyst Precursor

A versatile chemical used in the preparation of supported tantalum oxide catalysts and heterogeneous catalytic materials for green chemistry and sustainable industrial processes

Biomedical Material Component

A reagent used to develop tantalum-based coatings for prosthetic implants and contrast agents for CT or photoacoustic imaging due to its biocompatibility and density.